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Strong chips are strong in the industry, and chips are economically prosperous. Without chips, there is no security.

As the “crown jewel of the high-end manufacturing industry”, the chip is the integrated circuit, which is one of the important symbols of measuring a country’s overall strength and the core of the information industry. At one time, high-end equipment and materials for integrated circuits in China were basically in a state of blankness and were completely dependent on imports. Today, more than 20,000 scientists and technicians have gone through 9 years of research, and major national science and technology major projects have successfully created integrated circuit manufacturing innovation systems, leading and supporting the rapid rise of China's integrated circuit industry, and radiating the world leading LED and photovoltaic industry.

On May 23, the Ministry of Science and Technology, together with Beijing Municipality and Shanghai Municipal People’s Government, organized the National Science and Technology Major Project “Very Large Scale Integrated Circuit Manufacturing Equipment and Complete Technology” (referred to as the “IC Special Project”) results announcement conference, announcing a major national science and technology project. The phased goal of creating an integrated circuit manufacturing innovation system has been achieved.

The level of mainstream technology upgrades 5 generations of high-end equipment and materials from scratch

Chen Chuanhong, director of the major special project office of the Ministry of Science and Technology, introduced that integrated circuit chips are the cornerstone of the information age, and integrated circuit manufacturing technology represents the highest level of micro-manufacturing in the world today. Ye Tianchun, the chief technical engineer, compared the integrated circuits to the “food” of modern industry, and various kinds of electronic products and systems such as automobiles and industrial control were inseparable from the integrated circuits. Without the support of the IC industry, the information society has lost its foundation.

With regard to the introduction of advanced manufacturing equipment, materials, and processes, China's integrated circuit industry has been subject to various restrictions in the West for a long time, and high-end chips rely mainly on imports. China's integrated circuit products have exceeded oil since 2006 and become China's largest import product. In 2013, the annual import volume has exceeded US$200 billion.

In order to achieve independent innovation and development, the State Council approved the implementation of integrated circuit special projects in 2008, focusing on independent innovation in equipment, processes and materials. Chen Chuanhong introduced that this special project is led by the municipal governments of Beijing and Shanghai. A total of more than 200 enterprises and institutions and more than 20,000 scientific workers participated in the technological research and focused on six industrial clusters such as Beijing, Shanghai, Jiangsu, Shenyang, Shenzhen and Wuhan.

"After nine years of research, China has successfully developed more than 30 kinds of high-end equipment such as 14-nanometer etching machines and thin-film depositions, as well as hundreds of materials such as target materials and polishing fluids, and the performance has reached the international advanced level." Ye Tianchun introduced these products through The strict appraisal of large production lines began to be applied in batches and exported overseas, thus achieving a breakthrough from scratch and enabling our country's integrated circuit manufacturing technology system and industrial ecology to be established and improved.

Before the special implementation, the most advanced mass production process for domestic integrated circuit manufacturing was 130 nanometers, and the R&D process was 90 nanometers. In the past nine years, China's mainstream technological level has been upgraded for five generations. The 55, 40, and 28-nm three-generation complete sets of processes have been successfully developed and mass-produced. Breakthroughs have been made in the 22- and 14-nanometer lead technology research and development and independent intellectual property rights have been formed. Packaging companies have also entered the high-end from the low-end, three-dimensional high-density integrated technology has reached the international advanced level. The smart phones, communication devices, smart cards and other chip products manufactured by these processes have entered the market in large quantities and have increased the competitiveness of China's information industry.

Forming Independent Intellectual Property System to Support Enterprises to Participate in International Competition

The lack of independent intellectual property rights has always been a bottleneck problem that restricts the development of independent innovation in integrated circuit companies in China. Ye Tianchun said that cultivating independent intellectual property rights system is the most important task for major science and technology organizations. The special item puts forward a “patent-oriented R&D strategy”. In the past 9 years, it has applied for more than 23,000 domestic invention patents and more than 2,000 international invention patents. The resulting intellectual property system enables domestic companies to compete in international competition. Great changes have taken place, and the development model has also changed from "introducing, absorbing, and re-innovating" to a new model of "mainly independent research and development plus international cooperation."

China's integrated circuit industry has flourished in recent years, and major projects have played a significant role in innovation leadership and technical support. Fu Guoqing, chief engineer of the Shanghai Municipal Science and Technology Commission, said that integrated circuit equipment is not only the core supporting technology of the information industry, but also the leading high-end technology of the manufacturing industry. It is the cross-strategic commanding heights of the two industries. The technical requirements of integrated circuit equipment for the supporting industries are very high. Its development has led to the improvement of China's precision processing capabilities, surface treatment capabilities, basic materials, basic technologies, and basic components and parts, and has promoted China's manufacturing industry to high-end development.

It is understood that the use of special core technology obtained, radiation applied to LED, sensor, photovoltaic, liquid crystal panels, such as Pan-semiconductor manufacturing, so that China's relevant areas of equipment, the localization rate increased significantly. The high-end achievements of domestic enterprises' application projects have led to the development of complete sets of LED and photovoltaic manufacturing equipment, which has enabled China's LED and photovoltaic and other general semiconductor industries to significantly increase their overall competitiveness, significantly reduce investment costs, and achieve international leadership in industrial scale and technology.

Special layout industrial planning forms a market advantage

The IC project aims at nurturing truly usable products and making companies bigger and stronger, and has carried out organizational and institutional innovations. Zhang Boxu, director of the Beijing Economic and Trade Commission, introduced that the assessment system of “upstream assessment of the lower reaches, assessment of the whole machine, application of assessment technology, and market assessment products” ensured the practicality of scientific research results and achieved a large number of high-end markets that could withstand market inspections. product.

Take a new model of effective coordination of industrial chain, innovation chain, and financial chain, coordinate special and key regional industrial development planning, actively guide the local and social industries to follow-up on investment support, effectively promote the industrialization of special results, and support enterprises to make bigger Strong, form the scale of the industry, improve the overall industrial strength.

Fu Guoqing stated that by 2020, special projects will focus on the needs of traditional industrial upgrading and the development of strategic emerging industries to promote the use of innovative results in scale, and foster an internationally competitive industrial cluster.

Ye Tianchun introduced that the special project has been systematically deployed in 14 nanometer equipment, technology, packaging, and materials, and it is expected that it will fully enter into industrialization by 2018. The “Thirteenth Five-Year Plan” will also focus on supporting the research and development of internationally advanced technologies such as 7-5 nanotechnology and 3D memory, supporting Chinese companies to have core competitiveness in the global industrial chain, achieving industrial independent development and forming distinctive advantages.

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